A Thin-Film Piezoelectric Impact Sensor Array Fabricated on a Si Slider for Measuring Head-Disk Inte - Magnetics, IEEE Transactions on
نویسنده
چکیده
A new type of Acoustic Emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length : 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted : sensitivity and frequency characteristics, and a flying test over a rotating bump disk.
منابع مشابه
Piezoelectric impact force sensor array for tribological research on rigid disk storage media - Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Thls paper presents a method to measure impact forces on a surface by means of a piezoelectric thin film sensor array. The output signals of the sensor array provide information about the position, magnitude and wave form of the impact force. The sensor array may be used for tribological studies to the slider disk interface of a rigid disk storage device. In such a device a slider head assembly...
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